发明名称 WAFER LEVEL PACKAGE USING SILICON VIA CONTACTS FOR CMOS IMAGE SENSOR AND METHOD OF FABRICATING THE SAME
摘要 <p>The present invention relates to a wafer level package of a CMOS image sensor using silicon via contacts and a method of manufacturing the same. A wafer level package of a CMOS image sensor includes: a wafer where image sensor elements including a plurality of electrode pads are formed; a transparent substrate attached to a front side of the wafer; a via hole formed from a back side of the wafer to underneath of a plurality of electrode pads of the front side; a passivation layer formed on a remaining portion except the underneath of the electrode pads in the via hole and whole back side of the wafer; a via contact formed in the via hole; and a solder bump formed on the via contact of the back side of the wafer.</p>
申请公布号 WO2007043718(A1) 申请公布日期 2007.04.19
申请号 WO2005KR03370 申请日期 2005.10.11
申请人 PARK, TAE-SEOK;KIM, YOUNG SUNG 发明人 PARK, TAE-SEOK;KIM, YOUNG SUNG
分类号 H01L27/146 主分类号 H01L27/146
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