METHOD FOR THE PRODUCTION OF A DISK-SHAPED WORKPIECE BASED ON A DIELECTRIC SUBSTRATE, AND VACUUM PROCESSING SYSTEM THEREFOR

摘要

Disclosed is a dielectric substrate (100) that is coated in a vacuum deposition station (102) with a layer whose material is provided with a specific resistance (P), said specific resistance being defined as follows: 10-5 Omega cm <= rho <= 10-1 Omega cm, in such a way that the resulting surface resistance Rs lies within the following range: 0<Rs <= 10-4 Omega. The coated dielectric substrate (104) is then subjected to a reactive high-frequency plasma processing step in another station (105). ® KIPO & WIPO 2007