发明名称 LOW VOLTAGE THIN FILM TRANSISTOR WITH HIGH-K DIELECTRIC MATERIAL
摘要 A thin film transistor (TFT) includes a source electrode, a drain electrode, and a gate electrode. A gate insulator is coupled to the source electrode, drain electrode, and gate electrode. The gate insulator includes room temperature deposited high-K materials so as to allow said thin film transistor to operate at low operating voltage.
申请公布号 WO2006105077(A3) 申请公布日期 2006.12.21
申请号 WO2006US11263 申请日期 2006.03.28
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY;KIM, IL-DOO;TULLER, HARRY, L. 发明人 KIM, IL-DOO;TULLER, HARRY, L.
分类号 H01L51/05;H01L21/316 主分类号 H01L51/05
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