| 摘要 |
An illumination device for visual inspection based on reflected light and transmitted light is provided to discriminate a height direction of defects and readily detect fine defects. An illumination device for visual inspection based on reflected light and transmitted light includes a transmission part(2), a reflective mirror(3), a transmissive mirror(5), and a Fresnel lens(6). The transmission part irradiates illumination light onto a substrate. The reflective mirror is disposed opposite to the transmission part in an inclined manner. The transmissive mirror is disposed under the substrate in an inclined manner. The Fresnel lens is interposed between the reflective mirror and the transmissive mirror. An object to be inspected is mounted on the transmissive mirror.
|
