| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measuring method of the concentration of a plurality of chemical materials in an inspected sample capable of measuring the concentration of the chemical materials more accurately than a well-known method of measuring the concentration of the plurality of chemical materials in the inspected sample using a neutral network. <P>SOLUTION: Probability distribution of a system of measured actual data is estimated, a large number of false data is created according to the estimated distribution, and the neural network is made to learn this, thereby accurately measuring the concentration of the plurality of chemical materials in the inspected sample even when the number of measured data is limited. <P>COPYRIGHT: (C)2007,JPO&INPIT |
