| 摘要 |
PROBLEM TO BE SOLVED: To provide a wavelength conversion technology which generates light with desired wavelengths, such as ultraviolet light near wavelength 200 nm, with a high output by using a simple constitution and outputs the light at a high repetitive frequency or continuously. SOLUTION: A laser oscillator 1 generates laser light (first wavelength light L1) of 450 to 540 nm in wavelength and the first wavelength light L1 is converted by a nonlinear optical crystal 2 into light (second wavelength light L2) of 225 to 270 nm in wavelength, which is sent to a coupling mirror 5. A laser oscillator 3 generates laser light (third wavelength light L3) of 1,000 to 1,100 nm in wavelength, which is sent to the coupling mirror 5 through a reflecting member 4. Nonlinear optical crystal 6 such as CLBO crystal performs the sum frequency mixing of the second wavelength light L2 and the third wavelength light L3 through the coupling mirror 5 to generate ultraviolet light (fourth wavelength light L4) of 190 to 217 nm in wavelength. COPYRIGHT: (C)2007,JPO&INPIT |
