SUBSTRATE STICKING APPARATUS

摘要

PROBLEM TO BE SOLVED: To necessarily execute automatic electric connection only by mounting an electrostatic attraction plate without wiring and connecting. SOLUTION: An electrostatic attraction plate 3 is mounted on the mounting surfaces 5 of an upper holding plate 1 and a lower holding plate 2 by a fixing means 6. In this way, an input terminal 3d exposed from the back surface of the electrostatic attraction plate 3 electrically contacts a device side output terminal 7a arranged on the mounting surface 5 thereof, and power is supplied from a power source to the input terminal 3d of the electrostatic attraction plate 3 via the device side output terminal 7a. COPYRIGHT: (C)2007,JPO&INPIT