发明名称 Apparatus for forming alignment film and method for fabricating liquid crystal display panel using the same
摘要 An apparatus for forming an alignment film and a method for fabricating a liquid crystal display panel using the same are disclosed. A steam inspecting unit for inspecting a defective alignment film is disposed for two lines of rubbing equipment, so that a facility investment expense can be reduced and a space of a clean room can be effectively utilized. The apparatus for forming an alignment film comprises a rubbing equipment comprising at least one rubbing unit; and an alignment film inspecting unit installed between the two lines of rubbing equipment and inspecting an alignment film formed on a substrate.
申请公布号 US2006283388(A1) 申请公布日期 2006.12.21
申请号 US20050317235 申请日期 2005.12.27
申请人 LG.PHILIPS LCD CO., LTD. 发明人 CHOI BYOUNG C.
分类号 B05C13/00;B05C11/00 主分类号 B05C13/00
代理机构 代理人
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