| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection device capable of preventing a deformation of substrates moving over spaces of floating stage, using simple constitution. SOLUTION: The substrate inspection device includes a floating stage 3 surfacing a glass substrate, while a scattering plate 20 for scattering illuminating light is inserted into an illuminating light transmission section 15 formed on the floating stage 3. A holding fixture member 21 is fixed at the scattering plate 20, and height of the scattering plate 20 can be adjusted so as to match nearly with the height of the top face 3A of floating stage 3, by a level-adjusting screw 25 screwed into the holding fixture member 21. COPYRIGHT: (C)2007,JPO&INPIT
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