| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method, which can quickly and correctly carry out an operation of carving a minute sample out of a specimen, and can quickly and correctly position the minute sample on a sample base. SOLUTION: A probe is applied with a negative voltage, and brightness of the specimen is measured. In the case the minute sample is carved out of the specimen by using the probe, when the brightness decreases, such a judgement is made that the probe comes close to the specimen, and when the brightness increases rapidly after further decreasing, the probe is judged to be in contact with the specimen. In the case the minute sample connected to the probe is positioned on the sample base, when the brightness decreases, such a judgement is made that the minute sample connected to the probe comes close to the sample base, and when the brightness increases rapidly after further decreasing, the minute sample connected to the probe is judged to be in contact with the sample base. COPYRIGHT: (C)2007,JPO&INPIT
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