| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaluation method and a shape evaluation device having high analysis accuracy, concerning a method for analyzing and evaluating an aspheric shape and the shape evaluation device. SOLUTION: First of all, the most approximate polynomial curve is determined by an iterative method based on a least-squares method by using shape measured data. A curvature extreme-value point C of the approximate polynomial curve is determined, and a coordinate system of aspheric representation is acquired from the inclination of a coordinate tangent line at the point C. Coordinate transformation of the shape measured data into the determined coordinate system of the aspheric representation is performed, and the difference with design data is analyzed and evaluated. COPYRIGHT: (C)2007,JPO&INPIT
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