| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaluation method of carbon dioxide dissolved water capable of accurately quantifying the concentration of a very small amount of chlorine ions in the carbon dioxide dissolved water used in a wet washing process of an electronic material, and a water sampling device of a sample of the carbon dioxide dissolved water. SOLUTION: In the evaluation method of the carbon dioxide dissolved water, the carbon dioxide dissolved water prepared by dissolving carbon dioxide in ultrapure water is subjected to degassing treatment and chlorine ions in the carbon dioxide dissolved water are subsequently quantified. The water-sampling device of the sample of the carbon dioxide dissolved water has a degassing device for degassing the carbon dioxide dissolved water, an electroconductivity meter for measuring the electroconductivity of the degassed carbon dioxide dissolved water and a water-sampling container filled with the degassed carbon dioxide dissolved water. COPYRIGHT: (C)2007,JPO&INPIT
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