| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow regulating valve which achieves miniaturization while allowing highly accurate flow control. SOLUTION: The flow regulating valve comprises a valve body 2 having an operation chamber 14 to which fluid is supplied through a supply hole 14a, a vibrating member 12 in which a discharge hole 12a for discharging a fluid supplied to the operation chamber 14 is formed, a drive means 22 for imparting minute vibrations to the vibrating member 12 and a plug 18 which can block the discharge hole 12a accommodated in the operation chamber 14. COPYRIGHT: (C)2007,JPO&INPIT
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