发明名称
摘要 Aspects of the invention can provide an electrostatic capacitance detection device having M number of row lines and N number of column lines arranged in a matrix of M rows and N columns, and an electrostatic capacitance detection element formed at the intersection thereof. The electrostatic capacitance detection element can include a signal detection element, a signal amplifying element and a column selection element and a row selection element. The signal detection element can include a capacitance detecting electrode, a capacitance detecting dielectric layer, and a reference capacitor. One of a pair of electrodes in the reference capacitor is coupled to the row line. Accordingly, the invention can achieve a superior electrostatic capacitance detection device.
申请公布号 JP3858865(B2) 申请公布日期 2006.12.20
申请号 JP20030209667 申请日期 2003.08.29
申请人 发明人
分类号 G01B7/28;A61B5/117;G01R27/26;G06K9/00;G06T1/00;H01L21/336;H01L21/768;H01L29/786 主分类号 G01B7/28
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