发明名称 METHOD OF MANUFACTURING AN OPTICAL ELEMENT
摘要 <p>A method of manufacturing an optical element comprises an interferometric test of the optical element using an interferometer system of a Fizeau type combined with principles of white-light interferometry. The optical element is disposed in a cavity between a Fizeau surface and a mirror, and an optical path difference between a back surface of the optical element and the mirror is determined for determining parameters of the optical element, such as a thickness thereof . Measuring light from an optical delay apparatus is supplied to the Fizeau interferometer through an optical fiber.</p>
申请公布号 WO2006102997(A1) 申请公布日期 2006.10.05
申请号 WO2006EP02434 申请日期 2006.03.16
申请人 CARL ZEISS SMT AG;ALTENBERGER, MICHAEL;DOERBAND, BERND;WILLKENS, THOMAS 发明人 ALTENBERGER, MICHAEL;DOERBAND, BERND;WILLKENS, THOMAS
分类号 G01B9/02 主分类号 G01B9/02
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