<p>A method of manufacturing an optical element comprises an interferometric test of the optical element using an interferometer system of a Fizeau type combined with principles of white-light interferometry. The optical element is disposed in a cavity between a Fizeau surface and a mirror, and an optical path difference between a back surface of the optical element and the mirror is determined for determining parameters of the optical element, such as a thickness thereof . Measuring light from an optical delay apparatus is supplied to the Fizeau interferometer through an optical fiber.</p>
申请公布号
WO2006102997(A1)
申请公布日期
2006.10.05
申请号
WO2006EP02434
申请日期
2006.03.16
申请人
CARL ZEISS SMT AG;ALTENBERGER, MICHAEL;DOERBAND, BERND;WILLKENS, THOMAS
发明人
ALTENBERGER, MICHAEL;DOERBAND, BERND;WILLKENS, THOMAS