| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micro-boring method capable of highly precisely, reproducibly and efficiently bore a micro-hole of a disk for generating microplasm. <P>SOLUTION: This micro-boring method of the disk for generating microplasma with the thickness of 100-500 μm executes electric discharge machining at a prescribed position of the disk 11 for generating the microplasma while stepwisely and gradually exchanging a plurality of electric discharge machining electrodes 12 from a large diameter to a small diameter and taperedly forms a micro-hole with an aperture diameter of 5-10 μm. Preferably, the electric discharge machining electrode to be used in the last in the electric discharge machining has the tip diameter of 1-5 μm, the machining part diameter of 1-8 μm and a tip-part taper ratio of 10/150-1/500. <P>COPYRIGHT: (C)2007,JPO&INPIT |
