| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator which is enhanced in responsiveness and is suitable for highly accurately performing positioning of a mobile body. <P>SOLUTION: The piezoelectric actuator 7 comprises piezoelectric elements 12, two electrodes films 10a, 10b provided to one face of the piezoelectric elements 12, an electrode film 10c provided to the other face of the piezoelectric element 12, power sources 22a, 22b applying voltage to the electrode films 10a, 10b, and a control unit 26 controlling the power sources 22a, 22b. The control unit 26 controls the power sources 22a, 22b so that the voltage having two voltage waveforms, wherein the frequency is less than the resonance frequency of the piezoelectric elements 12 and the phase is different by 90°, is applied respectively to the electrode films 10a, 10b. <P>COPYRIGHT: (C)2007,JPO&INPIT |
