发明名称 PIEZOELECTRIC VIBRATION REED AND PIEZOELECTRIC DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration reed for preventing a short circuit between electrodes and preventing the disconnection of the electrodes, and further restraining a CI value to a low value even if the piezoelectric vibration reed is miniaturized, and to provide a piezoelectric device utilizing the piezoelectric vibration reed. <P>SOLUTION: The piezoelectric vibration reed comprises a base 51 formed of a piezoelectric material; a plurality of vibration arms 35, 36 that are formed integrally with the base 51 and extended in parallel with each other; long grooves 33, 34 formed along the longitudinal direction of each vibration arm; and an excitation electrode formed of inner-surface electrodes 44, 45 arranged on the inner surface of the long groove and side electrodes 46, 47 arranged on sides that oppose the inner-surface electrodes. The piezoelectric vibration reed also has a widening section 60 where widths of the respective vibration arms 35, 36 are widened toward the side of the base 51 at a root to the base 51 of the vibration arms 35, 36 while the side electrode 46 is routed to the side 60c and the main surface 60d of the widening section 60. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2006270177(A) 申请公布日期 2006.10.05
申请号 JP20050081501 申请日期 2005.03.22
申请人 SEIKO EPSON CORP 发明人 YAMADA YOSHIYUKI
分类号 H03H9/19;H01L41/09;H01L41/18;H03H9/215 主分类号 H03H9/19
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