| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of evaluating a film and a method of evaluating a ferroelectric film, which are capable of evaluating the film which retains the same condition as that before removing another film formed thereon even after the film formed thereon is removed. SOLUTION: The method comprises a process wherein the second film is removed from a specimen to be evaluated which includes a first film containing an oxide, and a second film arranged on the first film by spattering employing oxygen ion, and another process wherein the first film is evaluated. COPYRIGHT: (C)2007,JPO&INPIT
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