| 摘要 |
PROBLEM TO BE SOLVED: To realize in a short time defect kind teaching for outputting a condition of defect classification, in a visual inspection device having an automatic defect classification function aiming at a thin-film device. SOLUTION: In this visual inspection method and the device therefor, a defect is detected by comparison inspection based on an inspection image acquired by an optical type or electronic type defect detection means, and the characteristic quantity of the defect is calculated simultaneously, and defect classification is performed following a classification condition set beforehand in a classification condition setting means. The classification condition setting means has a constitution wherein the characteristic quantity of each defect of many defects acquired beforehand by the defect detection means is collected, and defects are sampled based on a defect characteristic quantity distribution extending to many collected defects, and the defect classification condition is set based on a review result of the sampled defects. COPYRIGHT: (C)2007,JPO&INPIT
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