| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe needle capable of performing accurate measurement even when an insulating film such as an oxide film is formed on the electrode surface of a measuring body, and preventing transcription of solder even when the electrode of the measuring body is a soldered electrode, and its manufacturing method. SOLUTION: This probe needle 11 is constituted of a metal pin 2, and fine carbon fibers 3 whose one end side is buried into the tip part surface of the metal pin 2, and whose other end side is erected radially from the tip part surface of the metal pin 2. The fine carbon fibers 3 work as sharp needles and pierces the insulating film such as the oxide film formed on the electrode surface of the measuring body, and resultantly a contact resistance value between the electrode of the measuring body and the probe needle 11 is lowered, to thereby improve measurement accuracy. Since solder does not adhere to the fine carbon fibers 3, even when the electrode of the measuring body is a soldered electrode, transcription of solder does not occur. COPYRIGHT: (C)2007,JPO&INPIT
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