发明名称 Method of forming transistor using step STI profile in memory device
摘要 A method of forming a memory device includes forming first and second isolation structures on a semiconductor substrate, the first and second isolation structures defining an active region therebetween; and etching a portion of the semiconductor substrate provided within the active region to define a step profile, so that the active region includes a first vertical portion and an upper primary surface, the first vertical portion extending above the upper primary surface.
申请公布号 US2006223263(A1) 申请公布日期 2006.10.05
申请号 US20050322843 申请日期 2005.12.29
申请人 HYNIX SEMICONDUCTOR INC. 发明人 HU HYUN
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
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