发明名称 |
pHEMT with barrier optimized for low temperature operation |
摘要 |
In one embodiment, a semiconductor device ( 500 ) includes a buffer layer ( 504 ) formed over a substrate ( 502 ). An Al<SUB>x</SUB>Ga<SUB>1-x</SUB>As layer ( 506 ) is formed over the buffer layer ( 504 ) and has a first doped region ( 508 ) formed therein. An In<SUB>x</SUB>Ga<SUB>1-x</SUB>As channel layer ( 512 ) is formed over the Al<SUB>x</SUB>Ga<SUB>1-x</SUB>As layer ( 506 ). An Al<SUB>x</SUB>Ga<SUB>1-x</SUB>As layer ( 518 ) is formed over the In<SUB>x</SUB>Ga<SUB>1-x</SUB>As channel layer ( 512 ), and the Al<SUB>x</SUB>Ga<SUB>1-x</SUB>As layer ( 518 ) has a second doped region formed therein. A GaAs layer ( 520 ) having a first recess is formed over the Al<SUB>x</SUB>Ga<SUB>1-x</SUB>As layer ( 518 ). A control electrode ( 526 ) is formed over the Al<SUB>x</SUB>Ga<SUB>1-x</SUB>As layer ( 518 ). A doped GaAs layer ( 524 ) is formed over the undoped GaAs layer ( 520 ) and on opposite sides of the control electrode ( 526 ) and provides first and second current electrodes. When used to amplify a digital modulation signal, the semiconductor device ( 500 ) maintains linear operation over a wide temperature range.
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申请公布号 |
US2006220062(A1) |
申请公布日期 |
2006.10.05 |
申请号 |
US20050100095 |
申请日期 |
2005.04.05 |
申请人 |
GREEN BRUCE M;HARTIN OLIN L;LAN ELLEN Y;LI PHILIP H;MILLER MONTE G;PASSLACK MATTHIAS;RAY MARCUS R;WEITZEL CHARLES E |
发明人 |
GREEN BRUCE M.;HARTIN OLIN L.;LAN ELLEN Y.;LI PHILIP H.;MILLER MONTE G.;PASSLACK MATTHIAS;RAY MARCUS R.;WEITZEL CHARLES E. |
分类号 |
H01L29/739 |
主分类号 |
H01L29/739 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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