发明名称 |
Laserverfahren zur Bearbeitung von Löchern in einer keramischen Grünfolie |
摘要 |
A plurality of feedthrough holes are efficiently formed on the present invention by splitting a laser beam emitted from a laser source (1) into plural laser beams (2) by allowing the beam to pass through a diffraction grating (3), followed by simultaneously forming a plurality of the feedthrough holes on the ceramic green sheet (10) by irradiating the ceramic green sheet (10) with the split laser beam. <IMAGE> |
申请公布号 |
DE60030195(D1) |
申请公布日期 |
2006.10.05 |
申请号 |
DE2000630195 |
申请日期 |
2000.03.30 |
申请人 |
MURATA MANUFACTURING CO. LTD. |
发明人 |
YAMAMOTO, TAKAHIRO;KOMATSU, HIROSHI;MORIMOTO, TADASHI;SHIKAMA, TAKASHI |
分类号 |
B23K26/00;H01S3/101;B23K26/06;B23K26/067;B23K26/38;H01L21/48;H05K3/00 |
主分类号 |
B23K26/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|