| 摘要 |
A cryopump cooled by a GM type refrigerator is disclosed in which the cold (second stage) cryopanel(s) are in planes that are pitched parallel to the axis of the expander cylinder; the cold end of the first stage expansion space is close to the point where the expander cylinder enters the vacuum housing that contains the cryopanels; and a drain system removes all the liquid argon and water flowing out through a vent port for two orientations of the cryopump.
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