| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oscillatory wave motor that is reduced in the wear of a friction contact face, stabilized in drive performance, eliminated in the occurrence of noise, and can achieve a long service life. <P>SOLUTION: In the oscillatory wave motor 10 comprising an elastic body 12 that generates vibration by the excitation of a piezoelectric body 11, and a moving body 13 that pressure-contacts with the elastic body 12 and is driven by the vibration, at least either of parts including the friction contact faces of the elastic body 12 and the moving body 13 is an electroless Ni-P/PTFE composite-plating membrane layer 17, and the other is an anode oxide coated membrane layer 18. Both the electroless Ni-P/PTFE composite-plating membrane layer 17 and the membrane layer 18 are not less than 250 in Vickers hardness, and the difference of the Vickers hardness between the two layers is not more than 100. <P>COPYRIGHT: (C)2007,JPO&INPIT |
