LIQUID CRYSTAL DISPLAY DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To solve the problems that a manufacture margin is small in a conventional four-piece mask process for which the number of manufacture steps is reduced, and the fluctuation of transistor characteristics is substantial and the decline of an yield is unavoidable when a channel length is shortened.

SOLUTION: The four-piece mask process and three-piece mask process plans of a TN liquid crystal display device are constructed by combining: a technology of rationalizing a signal line forming step and a pixel electrode forming step by introducing a halftone exposure technology; a technology of rationalizing an electrode terminal protective layer forming step by introducing the halftone exposure technology to a well-known technology of a source/drain wiring anodizing step; a technology of rationalizing a scanning line forming step and a protective insulation layer forming step by introducing the halftone exposure technology; and a rationalizing technology of eliminating the need of a contact forming step by removing even a gate insulation layer in the step of making a semiconductor layer into an island.

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