| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a storage container for a pellicle for photolithography, the container preventing deposition of foreign matters on a stored pellicle and contamination of a pellicle and keeping quality of the pellicle. <P>SOLUTION: The pellicle storage container comprises: a container body to place a pellicle and a cap body which covers a pellicle and is fitted and locked in the peripheral edge with the container body, wherein a pellicle is held by inserting a frame holding pin into a hole formed on an outer face of the pellicle frame. It is preferable that: the container body is made of a resin, and a metal component is joined to the container body; a positioning component to position the frame holding pin to hold a pellicle is mechanically linked with the metal component assembled in the container body; and an elastic material is laid at a contact portion of the frame holding pin holding the pellicle with the pellicle frame. More preferably, the container body and the cap body are made of a resin, each having antistatic performance of≤1×10<SP>12</SP>Ω/unit square surface resistance. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
