| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a high-reliability electron source capable of ensuring ohmic contact between a carbon nanotube and a conductive base material, having sufficient junction strength, and facilitating beam axis adjustment; to provide an electron microscope capable of providing improved resolution and luminance, reduced sample damage by a lowered acceleration voltage, and reduced cost and size thereof as compared with a conventional model by using the electron source; and to provide an electron beam drawing device capable of providing improved precision and efficiency, and reduced cost and size thereof. <P>SOLUTION: This electron source having a carbon nanotube is characterized by including a conductive base material, and the carbon nanotube coming into ohmic contact with the conductive base material. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
