| 摘要 |
PROBLEM TO BE SOLVED: To reduce the replenishment of a vapor deposition material and the changing frequency of a vapor deposition boat, and to enhance the efficiency of the continuous vapor deposition work by solving a problem that≥8 evaporation holes of the vapor deposition boat are hardly arranged at the position of vertical projection of an inscribed circle of a substrate, and by using the vapor deposition boat with the increased volume of a container portion of a bottom plate of the vapor deposition boat in the resistance heating type metallic vapor deposition boat for sublimable materials for sublimable materials and organic materials. SOLUTION: In the vapor deposition apparatus, evaporation holes of a cover are deviated from a center of the cover to a folded part side by using a metallic resistance heating type vapor deposition boat folded in an L-shape, the depth of a container portion of a bottom plate is increased, the vapor deposition boat is integrated with an electrode tool and an electrothermal sensor to form a movably adjustable power supply tool unit, and the power supply tool units are arranged in a radial direction. COPYRIGHT: (C)2007,JPO&INPIT
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