| 发明名称 |
Gas injector and apparatus including the same |
| 摘要 |
A gas injector includes: a plate including at least one first injection hole; and at least one nozzle module combined with the plate, the at least one nozzle module including at least one second injection hole connected to the at least one first injection hole.
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| 申请公布号 |
US2006219362(A1) |
申请公布日期 |
2006.10.05 |
| 申请号 |
US20060395643 |
申请日期 |
2006.03.31 |
| 申请人 |
HAN GEUN-JO;LEE JEONG-BEOM;KO BU-JIN |
发明人 |
HAN GEUN-JO;LEE JEONG-BEOM;KO BU-JIN |
| 分类号 |
H01L21/306;C23F1/00 |
主分类号 |
H01L21/306 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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