发明名称 PRESSURE SENSOR DEVICE AND METHOD
摘要 Embodiments of the present invention provide a diaphragm pressure gauge (100) with an interface printed circuit board ("PCB") (220) contained in a reference pressure chamber (205) of the diaphragm pressure gauge (100) for receiving signals from one or more sensing elements (215) in the reference pressure chamber. The sensing elements (215) can comprise, for example, piezoelectric strain gauges, piezoresistive strain gauges, capacitor elements or other elements used in determining the deflection in the diaphragm (210). The interface PCB (220) can be configured to connect the sensing elements (215) to pass-through electrical connections (240) in the housing of the reference pressure chamber (205). Thus, signals can be communicated from the sensing elements (215), through the interface board and out of the reference pressure chamber (205) via the pass-through electrical connections (240).
申请公布号 WO2005106962(A3) 申请公布日期 2006.10.05
申请号 WO2005US12282 申请日期 2005.04.11
申请人 CELERITY, INC.;MAI, HEI 发明人 MAI, HEI
分类号 H01L29/84;G01L9/00 主分类号 H01L29/84
代理机构 代理人
主权项
地址