| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of shortening a total inspection time by shortening a time needed for alignment, and an inspecting device. <P>SOLUTION: The inspecting device is equipped with an area segmenting circuit 215 which sets a plurality of areas in an X direction orthogonal to a Y direction by a plurality of inspection stripes of a photomask 101 virtually divided in the Y direction, a sensor circuit 106 etc., which acquire an optical image of the photomask 101 while moving in the X direction by the inspection stripes, a positioning circuit 216 which positions optical images by the areas relatively to a reference image for comparison, and a comparison decision processing circuit 218 which compares the positioned optical images with the reference image, and the area segmenting circuit 215 sets respective areas for next inspection stripes according to quantities of position shifting between the optical images in the respective areas in inspection stripes already having been positioned and the reference image. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
