| 摘要 |
PROBLEM TO BE SOLVED: To accurately and efficiently adjust a frequency on a piezoelectric diaphragm surface without the need of a special package or mounting board and to provide a piezoelectric vibrator of excellent characteristics. SOLUTION: A piezoelectric diaphragm 1 is composed of an AT cut crystal diaphragm in a rectangular planar shape, exciting electrode files 2 and 3 in a rectangular shape in the plane view are formed in the center region of the front and back surfaces, and also electrode thick parts 2a and 3a are formed. The electrode thick parts 2a and 3a are set to such a thickness that the electrode thick parts surely become a frequency characteristic adjustment object even in the case that the maximum dispersion is generated in the thickness of the piezoelectric diaphragm, and are turned to adjustment regions. To the regions, frequency characteristics are adjusted by an ion milling method. COPYRIGHT: (C)2007,JPO&INPIT
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