| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem of difficulty in positioning a mask and a sample by a structural constraint on a sample holder fixing tool of an ion milling device, although ion milling is an effective method for mirror-face polishing of a sample cross section. SOLUTION: The ion milling device is equipped with a sample mask unit main body 21 integrating a sample holder 23 fixing a sample 3 and its rotation mechanism as well as a mask 2 as well as its fine-tuning mechanism. The sample mask unit main body 21 is attached to a sample holder fixing tool 5, and is allowed to be disconnected, and that, allowed to be taken outside of a vacuum chamber. With this, the sample mask unit main body is set under another high-performance microscope, a positioning relation between a desired part of the mirror face of the sample to be polished and the mask can be set with high accuracy. COPYRIGHT: (C)2007,JPO&INPIT
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