| 摘要 |
PROBLEM TO BE SOLVED: To provide an airtight structure of a low-temperature device capable of achieving sufficient airtightness even under a low-temperature condition and improving its durability. SOLUTION: In this airtight structure mounted on a part openably and closably partitioning the inside and outside of the low-temperature device kept at a low temperature, a seal plate 15 composed of a metallic plate spring is mounted inside of the low-temperature device, a soft packing 16 is mounted outside of the device, and the seal plate and the packing are pressed to contact faces and elastically deformed to keep airtightness of the part. Further the contact face of the packing is provided with a heater. COPYRIGHT: (C)2007,JPO&INPIT
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