| 摘要 |
The invention provides an appearance inspection apparatus and an appearance inspection method wherein, in addition to defect information, information indicating differences between images used for inspecting the appearance of samples is reported to the user, thereby making it possible to present the differences between the samples which the user has been unable to know in the prior art appearance inspection. The appearance inspection apparatus comprises: an imaging unit ( 4 ) which captures an image of a surface of a sample ( 3 ); and a defect detecting unit ( 5, 6, 7, 8 ) which detects a defect on the sample ( 3 ) based on the image acquired by the imaging unit ( 4 ), wherein the appearance inspection apparatus further comprises: a distribution information computing unit ( 10 ) which computes distribution information indicating the distribution of pixel values in the image captured by the imaging unit ( 4 ); and a distribution information output unit ( 20 ) which outputs the distribution information in addition to information concerning the defect detected by the defect detecting unit ( 5, 6, 7, 8 ).
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