发明名称 |
Scanning electron microscope with measurement function |
摘要 |
A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.
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申请公布号 |
US2006219917(A1) |
申请公布日期 |
2006.10.05 |
申请号 |
US20060398522 |
申请日期 |
2006.04.06 |
申请人 |
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发明人 |
OJIMA YUUKI;SASADA KATSUHIRO;UEDA KAZUHIRO;MORIMOTO TSUYOSHI |
分类号 |
G01B15/00;G21K7/00;G01N23/00;G01N23/225;H01J37/22;H01J37/28;H01L21/66 |
主分类号 |
G01B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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