CAPACITIVE SENSOR WITH DAMPING

摘要

A capacitive accelerometer. The capacitive accelerometer includes a first fixed electrode and second fixed electrode. The first fixed electrode is separated from the second fixed electrode by a gap. A movable electrode is positioned between the first and second fixed electrodes, the movable electrode being movable between the first and second fixed electrodes. The movable electrode is dimensioned to produce a squeeze damping effect between the movable and fixed electrodes to damp movement of the movable electrode. Circuitry determines the position of the movable electrode in any position across substantially the entire gap between the first and second fixed electrodes.