| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce skew occurring when a clock signal is optically transmitted to a plurality of function blocks. <P>SOLUTION: An SOI substrate 114 is used in which a silicon single crystal film 113 is formed via an insulating material 112 is formed on a silicon substrate 111. Function blocks 115a to 115j are formed on the silicon single crystal film 113. Optical waveguides 116<SB>-1</SB>to 116<SB>-5</SB>are formed on the silicon substrate 111. An optical signal corresponding to the clock signal is supplied to one end of each of the optical waveguides 116<SB>-1</SB>to 116<SB>-5</SB>. The optical waveguides 116<SB>-1</SB>to 116<SB>-5</SB>are composed by using core materials having different refractive indices. PD 118a to 118j are formed on the silicon substrate 111 for supplying the clock signal to the the function blocks 115a to 115j, respectively. Each of PD118a to PD118j receives an optical signal guided by an optical waveguide which is composed of a core material which has a smaller refractive index as the waveguide distance becomes longer from the incident position of the optical signal. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
