| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for controlling a functional liquid feeding apparatus which can pressurize and feed various kinds of functional liquids so as to make pressure in a head to be specified set pressure when a plurality of different kinds of the functional liquids are stored in a plurality of functional liquid tanks, and so on. <P>SOLUTION: The method for controlling the functional liquid feeding apparatus comprising a pressure loss calculating process, a feeding pressure calculating process, and an independently pressurizing process, and so on are provided. The pressure loss calculating process calculates respectively pressure losses of functional liquid flow paths 84 for respective functional liquids reaching a functional liquid droplet delivering head 41 from a functional liquid tank 81. The feeding pressure calculating process, after taking the pressure losses into consideration, obtains the functional liquid feeding pressure so that the pressures in the head of various kinds of the functional liquids in the functional liquid droplet delivering head 41 become set pressure respectively set. The independently pressurizing process pressurizes respectively independently a plurality of the functional liquid tanks based on the calculated functional liquid feeding pressures. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
