| 摘要 |
PROBLEM TO BE SOLVED: To inspect the surface shape of a coating film of a flat display panel in a short time and at a low cost. SOLUTION: The surface shape of the coating film 22 formed on a substrate 21 is inspected using an optical system 31 having a light radiation means (optical fiber 28), a Fresnel lens 30, and an imaging means (area sensor camera 24). Light that is radiated from a light radiation means and passed through the fresnel lens 30 is radiated to the coating film 22, the reflection light at that time is imaged by an imaging means, and, when the gradation distribution of an image acquired by this imaging is analyzed and the inspection is performed, image processing for removing the gradation variation produced from the image with a characteristic of the optical system 31 is performed. COPYRIGHT: (C)2006,JPO&NCIPI
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