| 摘要 |
PROBLEM TO BE SOLVED: To prevent occurrence of latency time by temperature regulation of a sensor unit in continuous measurement, in a measuring device using total reflection attenuation. SOLUTION: A measuring machine 6 comprises a holder conveyance mechanism 71, a pickup mechanism 72, a measuring stage 73, and a stock section 74. Each of them is stored in case 75. A base plate 75a and side plate 75b of the case 75 have a jacket section 80 through which water circulates. By circulating water heated or cooled by a Peltier element 76 through each jacket section 80 with a circulation pump 77, the ambient temperature in the case 75 is adjusted to be constant. The stock section 74 is provided with three-stage shelf boards 92. A sensor unit 12 of a measurement waiting state after the completion of a fixing process, together with a holder 52, is mounted on each shelf board 92, thereby matching the temperature of each sensor unit 12 with the ambient temperature in the case 75. COPYRIGHT: (C)2006,JPO&NCIPI |
