发明名称 |
Method and system for controlling a substrate position in an electrochemical process |
摘要 |
By using signals from an electric drive assembly of an electroplating tool, the operating position of the substrate surface to be plated may be determined in an automated fashion wherein, based on a reference position, the meniscus of the electrolyte and/or any appropriate operating position may be determined. Consequently, accuracy and throughput may be enhanced compared to conventional manual or semi-automatic adjustment procedures.
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申请公布号 |
US2006193992(A1) |
申请公布日期 |
2006.08.31 |
申请号 |
US20050212048 |
申请日期 |
2005.08.25 |
申请人 |
BONKASS MATTHIAS;PREUSSE AXEL;NOPPER MARKUS |
发明人 |
BONKASS MATTHIAS;PREUSSE AXEL;NOPPER MARKUS |
分类号 |
B05D1/18;B05C11/00;B05C19/02 |
主分类号 |
B05D1/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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