MASK ALIGNING MECHANISM FOR FILM FORMING APPARATUS, AND FILM FORMING APPARATUS

摘要

A mask aligning mechanism for a film forming apparatus is provided for aligning a mask (26) in the film forming apparatus by arranging a mask clamp (22) in the film forming apparatus and aligning the mask (26) with the mask clamp (22). The mask clamp (22) is provided with an extending section (22a) which extends from a side of the mask (26) corresponding to an edge section of the mask (26), and a fitting pin (22b) which is provided on the extending section (22a). On the edge section of the mask (26), a fitting hole (26c) is provided for having the fitting pin (22b) of the mask clamp (22) fit in.