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发明名称
Heizvorrichtung mit einer elektrostatischen Anziehungsfunktion und Verfahren zu ihrer Herstellung
摘要
申请公布号
DE60302754(T2)
申请公布日期
2006.08.31
申请号
DE20036002754T
申请日期
2003.10.31
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
KANO, SHOJI;SATOH, KENJI;ITO, KENJI
分类号
H01L21/324;H05B3/20;C23C16/26;C23C16/38;F27D1/00;H01L21/00;H01L21/02;H01L21/68;H01L21/683;H05B3/10;H05B3/26;H05B3/74
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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