| 摘要 |
PROBLEM TO BE SOLVED: To provide a slim and lightweight substrate gripper in which operation is semipermanent, damage on a substrate can be minimized and contamination of the substrate can be reduced when it is gripped before and after a predetermined process. SOLUTION: The substrate gripper comprises a cam drive portion 20 fixed such that a cam is interlocked with an actuator 22, a body section 40 incorporating the cam, and a gripper portion 60 fixed radially to the body section 40 and having a large number of grippers for gripping the substrate selectively while being interlocked with the cam to perform linear motion. COPYRIGHT: (C)2006,JPO&NCIPI |
