| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrying container used for a locally cleaned environment in a clean room wherein substrates are exposed in air that effectively prevents external air from being entangled, even when the hermetic sealing state in a container body is released due to vibration at carrying or occurrence of lid open, so as to thereby avoiding adhesion of a foreign material and molecule contamination or the like resulting from the outside of the container to the substrates contained in the container. SOLUTION: The substrate carrying container is configured to include the container body 2 with an opening for containing the substrates 1 and depositing and withdrawing of the substrates 1, a lid for air-tightly covering the opening, and positive pressurizing means 5, 7, 8 for positively pressurizing the inside of the container body 2 in response to a timing when the hermetic sealing state of the inside of the container body 2 is released at least due to the opened lid. COPYRIGHT: (C)2006,JPO&NCIPI |
