| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device which can accurately position a substrate without damaging it even if the substrate is made large. SOLUTION: In a state where a slide member 6 is retreated, a cylinder unit 2 is operated to raise a supporting member 3, and a substrate W is received by the upper surface of the reception part 11 of a lifting member 8. Next, the cylinder unit 2 is operated to lower the supporting member 3 until the substrate W is on the same level of the slide member 6 of an alignment member 5, and a valve is changed over to connect the piping 12 of the lifting member 8 to a compressed air source. An air is allowed to be jetted from grooves 16 and 17 on the upper surface of the reception part 11 of the lifting member 8, so as to lift the substrate W from the upper surface of the reception part 11, move forward the slide member 6 of the alignment member 5, and bring a pusher 7 into contact with the edge of the substrate W for positioning. COPYRIGHT: (C)2006,JPO&NCIPI |
