| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater unit that ensures appreciable temperature rise and drop characteristics. SOLUTION: The heater unit 20 comprises electrodes 2 for increasing the temperature of a heater 1 when energized, the heater 1 of a material including silicon carbide connected to the electrodes 2, a wafer holder 5 for holding an object to be heated, and a chamber 3 with a reflection layer 8 at least on an inner surface for surrounding the heater and wafer holder 5. COPYRIGHT: (C)2006,JPO&NCIPI |
